Soft x-rays and extreme ultraviolet radiation
| Author | : David Attwood |
| Publisher | : |
| Total Pages | : 470 |
| Release | : 2000 |
| ISBN-10 | : 1139641328 |
| ISBN-13 | : 9781139641326 |
| Rating | : 4/5 (326 Downloads) |
Book Synopsis Soft x-rays and extreme ultraviolet radiation by : David Attwood
Download or read book Soft x-rays and extreme ultraviolet radiation written by David Attwood and published by . This book was released on 2000 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
